Finite Element Analysis of Silicon Nanowire Array based SAW Gas Sensor

Authors

  • Muhammad Izzudin Ahmad Asri School of Electrical Engineering, Faculty of Engineering, Universiti Teknologi Malaysia, 81310 UTM Johor Bahru, Johor, Malaysia
  • Md. Nazibul Hasan School of Electrical Engineering, Faculty of Engineering, Universiti Teknologi Malaysia, 81310 UTM Johor Bahru, Johor, Malaysia
  • Mariatul Rawdhah Ahmad Fua’ad School of Electrical Engineering, Faculty of Engineering, Universiti Teknologi Malaysia, 81310 UTM Johor Bahru, Johor, Malaysia
  • Fatimah Khairiah Abd Hamid School of Electrical Engineering, Faculty of Engineering, Universiti Teknologi Malaysia, 81310 UTM Johor Bahru, Johor, Malaysia
  • Yusri Md Yunos School of Electrical Engineering, Faculty of Engineering, Universiti Teknologi Malaysia, 81310 UTM Johor Bahru, Johor, Malaysia
  • Mohamed Sultan Mohamed Ali Universiti Teknologi Malaysia

Abstract

This work presents the design and finite element analysis of a surface acoustic wave (SAW)-based sensor for the detection of volatile organic compound (VOC) gases. The effect of silicon nanowire array (SiNWA) on a 128º YX-lithium niobate (LiNbO3) substrate for sensing the VOC gases was simulated using COMSOL Multiphysics. The frequency response was investigated in relation to changes in the SiNWA sensitive layer and VOC gas concentration. The resonant frequency of the SAW device was also evaluated, and simulation results were obtained after being exposed to 100ppm concentration of VOC gas. It was determined that the frequency increased, after the sensor was exposed to VOC gases. In general, extending the length of the SiNWA enhances the sensor's sensitivity.

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Published

2021-09-15

How to Cite

Ahmad Asri, M. I. ., Hasan, M. N., Ahmad Fua’ad, M. R. ., Abd Hamid, F. K., Md Yunos, Y. ., & Mohamed Ali, M. S. (2021). Finite Element Analysis of Silicon Nanowire Array based SAW Gas Sensor. ELEKTRIKA- Journal of Electrical Engineering, 20(2-2), 36–40. Retrieved from https://elektrika.utm.my/index.php/ELEKTRIKA_Journal/article/view/305

Issue

Vol. 20 No. 2-2 (2021): Special Issue on Microelectromechanical Systems (MEMS) & Electronics

Section

Articles

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