OTHMAN, Nur Afiqah et al. Effects of radio-frequency power on structural properties and morphology of AlGaN thin film prepared by co-sputtering technique. ELEKTRIKA- Journal of Electrical Engineering, [S. l.], v. 20, n. 2, p. 14–18, 2021. DOI: 10.11113/elektrika.v20n2.270. Disponível em: https://elektrika.utm.my/index.php/ELEKTRIKA_Journal/article/view/270. Acesso em: 8 may. 2024.