Othman, Nur Afiqah, et al. “Effects of Radio-Frequency Power on Structural Properties and Morphology of AlGaN Thin Film Prepared by Co-Sputtering Technique”. ELEKTRIKA- Journal of Electrical Engineering, vol. 20, no. 2, Aug. 2021, pp. 14-18, doi:10.11113/elektrika.v20n2.270.