Othman NA, Nayan N, Mustafa MK, Azman Z, Megat Hasnan MMI, Jaafar SN, et al. Effects of radio-frequency power on structural properties and morphology of AlGaN thin film prepared by co-sputtering technique. Elektrika [Internet]. 2021 Aug. 28 [cited 2024 Dec. 22];20(2):14-8. Available from: https://elektrika.utm.my/index.php/ELEKTRIKA_Journal/article/view/270